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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING POSITIVE RESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2003330202
Kind Code:
A
Abstract:

To provide a method for manufacturing a positive resist composition having small changes in sensitivity with time and an excellent spreading property of a developer liquid.

The method for manufacturing a positive resist composition containing a resin having a monocyclic or polycyclic alicyclic hydrocarbon structure and increasing the solubility with an alkali developer liquid by the effect of an acid includes a filtration process to filter the resin having a monocyclic or polycyclic hydrocarbon structure and increasing the solubility with an alkali developer liquid by the effect of an acid through an ion exchange filter. Preferably, the method includes a filtration process to filter the resin having a monocyclic or polycyclic alicyclic hydrocarbon structure and increasing the solubility with an alkali developer liquid by the effect of an acid through a filter which removes insoluble colloid.


Inventors:
NAKAO HAJIME
Application Number:
JP2002134146A
Publication Date:
November 19, 2003
Filing Date:
May 09, 2002
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
G03F7/039; B01J39/00; G03F7/26; (IPC1-7): G03F7/26; B01J39/00; G03F7/039
Attorney, Agent or Firm:
Shohei Oguri (4 outside)