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Title:
METHOD FOR MANUFACTURING PRINTED CIRCUIT SUBSTRATE HAVING ULTRA FINE WIRING PATTERN
Document Type and Number:
Japanese Patent JP2003051657
Kind Code:
A
Abstract:

To obtain a high-density printed circuit substrate in which a pattern having proper copper foil adhesive force and a good shape is manufactured of ultra fine wirings on a thin copper foil-clad copper-clad substrate.

A method for manufacturing a printed circuit substrate, having the ultra fine wiring pattern comprises the steps of applying electroless copper plating of 0.1 to 1 μm and then electric copper plating of 0.5 to 3 μm by using an ultra thin copper foil (a), having a copper foil thickness of 5 μm or less of an outermost layer formed with a through-hole and/or a blind via hole, adhering a plating resist (h), then making electric copper plating of 6 to 30 μm to adhere, further making adhering plating resist (j) thereon, making nickel plating and gold plating or solder plating to adhere at a position in which the plating resist is not adhered, peeling off the resist, and then melt removing a thin electrical copper plating layer (g), an electroless copper plating layer (f) and the ultra fine copper foil layer by etching to form a pattern of line/space = 40/40 μm or less. Accordingly, the high-density printed circuit substrate having the very small undercut of the pattern and superior copper foil adhering force can be obtained.


Inventors:
TAKE MORIO
IKEGUCHI NOBUYUKI
KOMATSU KATSUJI
Application Number:
JP2001238861A
Publication Date:
February 21, 2003
Filing Date:
August 07, 2001
Export Citation:
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Assignee:
MITSUBISHI GAS CHEMICAL CO
International Classes:
H05K1/11; H05K3/06; H05K3/18; H05K3/24; H05K3/42; H05K3/46; (IPC1-7): H05K3/06; H05K1/11; H05K3/18; H05K3/24; H05K3/42; H05K3/46
Domestic Patent References:
JPS6481296A1989-03-27
JP2002016356A2002-01-18
JP2000114693A2000-04-21
JPH0469992A1992-03-05
JPH0316296A1991-01-24
Attorney, Agent or Firm:
Takashi Nagai