To provide a method for manufacturing a probe needle by which stable contact is possible, with high hardness and long life.
A method for manufacturing a probe needle includes: a photolithography process of forming a resist pattern 16 having a recess 15 in the shape of the probe needle 10 which should be formed on a substrate 14; an electroforming process of performing electroplating by using nickel sulfamate plating solution in which a carbon nanotube 17 and dispersant for dispersing the carbon nanotube 17 are mixed, and forming a nickel plating body 18 in which the carbon nanotube 17 is mixed in the recess 15 of the resist pattern 16; a process of removing the resist pattern 16; a process of peeling the nickel plating body 18 from the substrate 14; and an etching process of etching nickel at least at the tip part of the obtained nickel plating body 18 to expose the carbon nanotube 17.
NAKAMURA MORINOBU
KIMURA HITOMI
SEIKEN CO
| JP2010002391A | 2010-01-07 | |||
| JP2010507098A | 2010-03-04 | |||
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Takashi Okamura
Horimai Kazuharu
Yoshihiro Hirai
Masahiko Denda