Title:
METHOD OF MANUFACTURING PROBE, AND PROBE
Document Type and Number:
Japanese Patent JP2016161548
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a probe such that the size and shape of a metal nanostructure can be controlled, and the probe.SOLUTION: An oxide film at a tip part of a probe 12 for SPM is removed by irradiating the tip of the probe 12 with a converged ion beam. Then the probe 12 is dipped in a gold chloride acid aqueous solution (metal ion-containing solution) 3. Au is deposited on the part of the probe 12 where the oxide film is removed and an aggregate 13 of an Au nanostructure (metal structure) is formed. Consequently, a probe 12 having the metal structure formed at a tip part is manufactured. The probe 12 is used to measure chip-enhanced Raman scattering.SELECTED DRAWING: Figure 3
Inventors:
NISHI MASAYUKI
HIRAO KAZUYUKI
ITASAKA HIROKI
OKUDA KOJI
MORIKAWA MARIE
NAKADA YASUSHI
NAKA YOKO
HIRAO KAZUYUKI
ITASAKA HIROKI
OKUDA KOJI
MORIKAWA MARIE
NAKADA YASUSHI
NAKA YOKO
Application Number:
JP2015043766A
Publication Date:
September 05, 2016
Filing Date:
March 05, 2015
Export Citation:
Assignee:
UNIV KYOTO
HORIBA LTD
HORIBA LTD
International Classes:
G01N21/65; C23C18/18; C23C18/31; C23C18/38; C23C18/42; G01Q60/38; G01Q60/42
Domestic Patent References:
| JP2009276344A | 2009-11-26 | |||
| JP2008281530A | 2008-11-20 | |||
| JP2000208090A | 2000-07-28 | |||
| JP2010536033A | 2010-11-25 | |||
| JP2003004622A | 2003-01-08 | |||
| JP2009002870A | 2009-01-08 | |||
| JP2011158283A | 2011-08-18 | |||
| JP2010276617A | 2010-12-09 | |||
| JP2003240700A | 2003-08-27 | |||
| JP2012514748A | 2012-06-28 |
Foreign References:
| US20140193585A1 | 2014-07-10 |
Other References:
PRZEMYSLAW R. BREJNA AND PETER R. GRIFFITHS: "Electroless Deposition of Silver Onto Silicon as a Method of Preparation of Reproducible Surface-Enh", APPLIED SPECTROSCOPY, vol. Volume 64, Number 5, JPN6018052021, 2010, pages 493-499
MUTALIFU ABULIKEMU, EMAN HUSNI DA’AS, HANNA HAVERINEN, DONGKYU CHA, MOHAMMAD AZAD MALIK, AND GHASSA: "In Situ Synthesis of Self-Assembled Gold Nanoparticles on Glass or Silicon Substrates through Reacti", ANGEW. CHEM. INT. ED., vol. 52, JPN6018052022, 2013, pages 1-5
藤原 良太 他: "アルゴンプラズマエッチングがシリコンへの金属微粒子無電解置換析出に及ぼす影響", 表面技術, vol. 63, no. 9, JPN6018052024, 2012, JP, pages 581-584
MUTALIFU ABULIKEMU, EMAN HUSNI DA’AS, HANNA HAVERINEN, DONGKYU CHA, MOHAMMAD AZAD MALIK, AND GHASSA: "In Situ Synthesis of Self-Assembled Gold Nanoparticles on Glass or Silicon Substrates through Reacti", ANGEW. CHEM. INT. ED., vol. 52, JPN6018052022, 2013, pages 1-5
藤原 良太 他: "アルゴンプラズマエッチングがシリコンへの金属微粒子無電解置換析出に及ぼす影響", 表面技術, vol. 63, no. 9, JPN6018052024, 2012, JP, pages 581-584
Attorney, Agent or Firm:
Hideno Kono
Nobuo Kono
Nobuo Kono