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Title:
METHOD FOR MANUFACTURING PYROELECTRIC INFRARED DETECTOR
Document Type and Number:
Japanese Patent JP2001196651
Kind Code:
A
Abstract:

To provide a highly reliable pyroelectric infrared detector which can reduce popcorn noises.

A conductor pattern is formed on the back of a multi-polarized pyroelectric substrate and electrically grounded. Then, charged particles are irradiated to the pyroelectric substrate from the surface to be uniformly polarized with aligned polarizing orientation on the conductor pattern on the back and in the region surrounded by the front surface opposite to the back, and a conductor pattern is formed on the uniformly polarized surface to obtain an infrared detecting section having the surface and the back of the substrate with reverse polarization. Before irradiating the charged particles, the conductor pattern may be formed so as to polarize the surface of the pyroelectric substrate reversely to the back thereof. Or, the pyroelectric substrate formed in the uniform polarization may be polarized in multi-polarized orientation by irradiating the charged particles to a region except for the region allocated for the infrared detecting section.


Inventors:
MATSUSHIMA CHOMEI
YAGYU HIROYUKI
KOMAKI KATSUJI
Application Number:
JP2000003911A
Publication Date:
July 19, 2001
Filing Date:
January 12, 2000
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
H01L37/02; G01J1/02; G01J5/02; G01J5/34; (IPC1-7): H01L37/02; G01J1/02; G01J5/02
Attorney, Agent or Firm:
Kurata Masahiko