Title:
レジスト組成物および微細パターンが形成された基板の製造方法
Document Type and Number:
Japanese Patent JP5006055
Kind Code:
B2
Inventors:
Yo Momose
Masaru Nakamura
Masaru Nakamura
Application Number:
JP2007006008A
Publication Date:
August 22, 2012
Filing Date:
January 15, 2007
Export Citation:
Assignee:
Mitsubishi Rayon Co., Ltd.
International Classes:
C08F20/30; C08F16/12; C08F18/10; G03F7/039; H01L21/027
Domestic Patent References:
| JP2007146142A | ||||
| JP2001174995A | ||||
| JP2007114728A | ||||
| JP2008169339A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama