Title:
METHOD FOR MANUFACTURING SAMPLE STORAGE CELL
Document Type and Number:
Japanese Patent JP2017224507
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To manufacture a highly-convenient sample storage cell in a high yield.SOLUTION: A method for manufacturing a sample storage cell in an embodiment includes the steps of: implanting an impurity into a first region of a first substrate; implanting the impurity into a second region of a second substrate; forming an intermediate layer on at least the first substrate or the second substrate; joining the first substrate and the second substrate; forming a bottomed first opening and at least two openings including a second opening and a third opening through which the intermediate layer is exposed in the first region by etching at least a partial region of the first substrate using a first etchant; forming a bottomed fourth opening in the second region by etching a partial region of the second substrate using the first etchant; and forming an observation space and a flow passage space by supplying a second etchant to the intermediate layer via the second opening and the third opening to etch the intermediate layer.SELECTED DRAWING: Figure 3
Inventors:
MORII AKIO
Application Number:
JP2016119651A
Publication Date:
December 21, 2017
Filing Date:
June 16, 2016
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
H01J37/20
Attorney, Agent or Firm:
Takahashi Hayashi & Partners