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Title:
METHOD FOR MANUFACTURING SAPPHIRE SUBSTRATE, AND SAPPHIRE SUBSTRATE
Document Type and Number:
Japanese Patent JP2013129023
Kind Code:
A
Abstract:

To provide a method for manufacturing a sapphire substrate with surface roughness in the same level of that of a sapphire substrate surface which has been obtained by chemical mechanical polishing (CMP) even if processing cost is reduced, and to provide a sapphire substrate.

The method for manufacturing the sapphire substrate in which a substrate obtained by slicing a sapphire ingot is subjected to processing including a plurality of steps to manufacture a sapphire substrate includes: a wet blasting step where at least a principal surface 10A of the substrate 10 is subjected to wet blast; and a CMP step where the wet-blasted principal surface 10A is subjected to CMP after the wet blasting step.


Inventors:
YOSHII MOTOYASU
Application Number:
JP2011280488A
Publication Date:
July 04, 2013
Filing Date:
December 21, 2011
Export Citation:
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Assignee:
SHARP KK
International Classes:
B24B1/00; B24C3/00; B24C5/02; H01L21/304
Attorney, Agent or Firm:
Patent Business Corporation Ark Patent Office