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Title:
トレンチ素子分離領域を有する半導体装置の製造方法
Document Type and Number:
Japanese Patent JP3601334
Kind Code:
B2
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Inventors:
Yutaka Maruo
Application Number:
JP717999A
Publication Date:
December 15, 2004
Filing Date:
January 14, 1999
Export Citation:
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Assignee:
Seiko Epson Corporation
International Classes:
H01L21/76; H01L27/08; (IPC1-7): H01L21/76; H01L27/08
Domestic Patent References:
JP10270546A
Attorney, Agent or Firm:
Inoue Ichi
Yukio Fuse
Mitsue Obuchi



 
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