Title:
METHOD OF MANUFACTURING SENSOR FOR RECOGNIZING SURFACE SHAPE
Document Type and Number:
Japanese Patent JP3887252
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To stably and highly sensitively detect a surface shape in a highly reliable condition without bringing an electrostatic discharge damage caused by a static electricity generated in sensing.
SOLUTION: A metal film 110 comprising Ti/TiN is formed on a passivation film 19 including an inside of a through-hole 109a, by a spattering method. Then a resist pattern 111 of a lattice-like shape in top view is formed astride an area on a connection electrode film 108 to arrange an each sensor electrode 107 in the central part of each box therein. The metal film 110 is selectively etched thereafter to be removed by a dry etching method such as reactive ion etching method, for example, using the resist pattern 111 as a mask.
Inventors:
Yasuyuki Tanabe
Katsuyuki Machida
Kuraki 100 million
Tetsuya Onishi
Bear Saki Toshihiko
Katsuyuki Machida
Kuraki 100 million
Tetsuya Onishi
Bear Saki Toshihiko
Application Number:
JP2002071421A
Publication Date:
February 28, 2007
Filing Date:
March 15, 2002
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
Sharp Corporation
NTT Electronics Corporation
Sharp Corporation
NTT Electronics Corporation
International Classes:
G01B7/28; G06K9/00; H01L21/44; (IPC1-7): G01B7/28
Domestic Patent References:
| JP2000230801A | ||||
| JP2000266506A | ||||
| JP2001120519A | ||||
| JP2001141411A | ||||
| JP2001208509A | ||||
| JP52026292A |
Attorney, Agent or Firm:
Yuichi Negishi
Takumi Iritono
Yasushi Motoyama
Takumi Iritono
Yasushi Motoyama
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