Title:
シリコン単結晶の製造方法
Document Type and Number:
Japanese Patent JP4396505
Kind Code:
B2
Inventors:
Yoichi Yamamoto
Hideki Fujiwara
Hideki Fujiwara
Application Number:
JP2004360645A
Publication Date:
January 13, 2010
Filing Date:
December 14, 2004
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B29/06; C30B33/02
Domestic Patent References:
| JP58130194A | ||||
| JP9309791A | ||||
| JP56104799A |
Attorney, Agent or Firm:
Masayoshi Suda