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Title:
METHOD FOR MANUFACTURING SINGLE CRYSTAL OF GROUP III ELEMENT NITRIDE, AND REACTION VESSEL USED THEREFOR
Document Type and Number:
Japanese Patent JP2005263535
Kind Code:
A
Abstract:

To provide a method for manufacturing efficiently a group III element nitride, e.g. gallium nitride or aluminum nitride, with high quality.

A group III element such as gallium or aluminum and an alkali metal such as sodium are put into a crucible in a nitrogen gas atmosphere and thermally melted under pressure, thus growing a single crystal. The crucible used here is (A) one made of a nitrogen-free material having a melting point or decomposition temperature of 2,100°C or higher or (B) one made of at least one material selected from the group consisting of rare earth oxides, alkaline earth metal oxides, W, SiC, diamond, and diamond-like carbon, this material preferably being, for example, Y2O3. The above yielded single crystal, as illustrated with a photograph (A) of the figure, is colorless and transparent and has a high quality and a maximum diameter of 2 cm or more.


Inventors:
SASAKI TAKATOMO
MORI YUSUKE
YOSHIMURA MASASHI
KAWAMURA SHIRO
UMEDA HIDEKAZU
Application Number:
JP2004076129A
Publication Date:
September 29, 2005
Filing Date:
March 17, 2004
Export Citation:
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Assignee:
JAPAN SCIENCE & TECH AGENCY
International Classes:
C30B29/38; C30B11/06; (IPC1-7): C30B29/38; C30B11/06
Attorney, Agent or Firm:
Ikeuchi, Sato & Partners