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Title:
METHOD FOR MANUFACTURING SPECIFIC-GAS-DISSOLVED WATER, AND APPARATUS AND METHOD FOR CIRCULATING SPECIFIC-GAS-DISSOLVED WATER
Document Type and Number:
Japanese Patent JP2008006332
Kind Code:
A
Abstract:

To provide a method and an apparatus for manufacturing a specific-gas-dissolved water which can separate and recover the specific-gas from the specific-gas dissolved water by deaeration and effectively use the recovered specific-gas and the deaerated water, and also to provide a circulating method.

The method for manufacturing the specific-gas-dissolved water deaerates the specific-gas-dissolved water, separates it into the deaerated water and an exhaust gas, recovers the specific-gas from the exhaust gas, dissolves the recovered specific-gas into the deaerated water and manufactures the specific-gas dissolved water. The apparatus for manufacturing the specific-gas dissolved water having a deaerating apparatus which separates the specific-gas-dissolved water into the deaerated water and the exhaust gas, an apparatus for recovering specific-gas which recovers the specific-gas from the exhaust gas, and a specific-gas dissolving device manufactures the specific-gas dissolved water by dissolving the recovered specific-gas into the deaerated water. Further, the method for circulating the specific-gas-dissolved water manufactures the specific-gas-dissolved water by dissolving the specific-gas recovered by separating the deaerated water and the exhaust gas into the deaerated water when the specific-gas-dissolved water is returned from a use point to a storage tank.


Inventors:
TOKOSHIMA HIROTO
MORITA HIROSHI
Application Number:
JP2006176785A
Publication Date:
January 17, 2008
Filing Date:
June 27, 2006
Export Citation:
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Assignee:
KURITA WATER IND LTD
International Classes:
B01F1/00; B08B3/08; B08B3/10; C02F1/20; H01L21/304
Attorney, Agent or Firm:
Mitsuru Uchiyama