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Title:
METHOD OF MANUFACTURING SPECIMEN FOR TRANSMISSION ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JPH05231997
Kind Code:
A
Abstract:

PURPOSE: To manufacture a specimen capable of performing section observation at a specific position by the use of a transmission electron microscope.

CONSTITUTION: A highly polymeric film 6 formed by means of a plasma polymerization method using a mixed gas of methane and acetylene is shaped on a device pattern 4. Next, about 2μm before and behind a position desired to observe a section shape is left and the highly polymeric film 6 of the other part is removed by means of a focusing ion beam method. Next, the device pattern 4 except for the circumferential part of a section observation position 5 is removed by means of chemical treatment for using hydrofluoric acid. Finally the device pattern 4 except for the pole circumferential part of a section observation part is removed by means of the focusing ion beam method for the purpose of leaving a thin film wall of a film thickness of about 300nm.


Inventors:
Hata, Yoshifumi
Application Number:
JP1992000035984
Publication Date:
September 07, 1993
Filing Date:
February 24, 1992
Export Citation:
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Assignee:
MATSUSHITA ELECTRON CORP
International Classes:
G01N1/28; H01J37/20; H01J37/26; (IPC1-7): G01N1/28; H01J37/20; H01J37/26
Attorney, Agent or Firm:
小鍜治 明 (外2名)



 
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