PURPOSE: To manufacture a specimen capable of performing section observation at a specific position by the use of a transmission electron microscope.

CONSTITUTION: A highly polymeric film 6 formed by means of a plasma polymerization method using a mixed gas of methane and acetylene is shaped on a device pattern 4. Next, about 2μm before and behind a position desired to observe a section shape is left and the highly polymeric film 6 of the other part is removed by means of a focusing ion beam method. Next, the device pattern 4 except for the circumferential part of a section observation position 5 is removed by means of chemical treatment for using hydrofluoric acid. Finally the device pattern 4 except for the pole circumferential part of a section observation part is removed by means of the focusing ion beam method for the purpose of leaving a thin film wall of a film thickness of about 300nm.