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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING SPUTTERING TARGET CONTAINING INDIUM OXIDE
Document Type and Number:
Japanese Patent JP2006045631
Kind Code:
A
Abstract:

To provide a method for obtaining a sputtering target containing indium oxide at high production efficiency while maintaining high density.

In the manufacturing method, slurry is prepared by mixing water, organic binder and dispersant in raw powder of metal oxide containing indium oxide powder, and pulverizing the mixture, granulated powder is obtained by drying and spraying the slurry, the obtained granulated powder is compacted, and, by firing the obtained compact, the sputtering target is obtained. Acrylic acid-methacrylic acid copolymer ammonium neutralizer is used as the dispersant, and inexpensive polyvinyl alcohol can be used for organic binder.


Inventors:
MIZUNUMA SHOHEI
Application Number:
JP2004229881A
Publication Date:
February 16, 2006
Filing Date:
August 05, 2004
Export Citation:
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Assignee:
SUMITOMO METAL MINING CO
International Classes:
C23C14/34; C04B35/457; C04B35/632
Attorney, Agent or Firm:
Kameda Tetsuaki