To provide a method for manufacturing a stamper, in which the stamper is formed by controlling the width of a projecting part pattern as desired while estimating an amount of side etching during pattern transfer by an imprinting method and satisfactory mold release characteristic is obtained when applying a mold release agent.
The method for manufacturing the stamper is characterized by: forming a conductive layer on the surface of a master disk having irregularities; forming an electroforming layer on the conductive layer; separating the electroforming layer and the conductive layer from the master disk to form the stamper to which the patterns of protrusions and recesses of the master are transferred; removing the resist remaining on the surface of the stamper; and etching the surface of the stamper with an acidic solution having a pH of 3.
KIMURA KAORI
SHIMADA TAKUYA
KAMATA YOSHIYUKI
SAKURAI MASATOSHI
JPH04351731A | 1992-12-07 | |||
JPS61501459A | 1986-07-17 | |||
JP2006286137A | 2006-10-19 | |||
JP2006048848A | 2006-02-16 | |||
JP2001014741A | 2001-01-19 | |||
JPH0261837A | 1990-03-01 |
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto