To provide a method of manufacturing a stamper by which difference in height of unevenness of a pattern of a mother stamper is increased for solving the following problems: a resist layer is made thinner with the narrowing and the densifying of a track pitch of an uneven pattern of the mother stamper and difference in height of the unevenness on a manufactured original disk is reduced, which often causes the defect of the uneven pattern of a resist mask on a medium due to the poor transfer in imprinting.
A conductive thin film 19 is formed on the bottom surface 18a of the recessed part and the upper surface of the projecting part of the uneven pattern on the mother stamper 18 so that the thickness of the film on the projecting part upper surface is larger than that on the recessed part bottom surface. After that, a strippable layer 20 is formed on the surface of the conductive thin film and continuously an electroformed layer 21 is formed by immersing the strippable layer 20 in a nickel aminosulfonate solution using an electroforming method. After that, the electroformed layer is stripped off from the mother stamper to duplicate a son stamper 22 as a third stamper.
SUGIMURA SHINOBU
KAMATA YOSHIYUKI
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen