Title:
METHOD FOR MANUFACTURING STAND-ALONE THIN FILM
Document Type and Number:
Japanese Patent JP2012131699
Kind Code:
A
Abstract:
To provide a simple and highly cost-effective method for manufacturing a stand-alone and/or intact thin film.
The method for manufacturing stand-alone thin film includes steps of: providing a substrate; depositing a carbon-containing sacrificial layer onto the substrate; depositing a thin film onto the carbon-containing sacrificial layer. Thereafter, the substrate having the carbon-containing sacrificial layer and the thin film is exposed to oxygen at a high temperature. The oxygen reacts with the carbon-containing sacrificial layer to produce carbon dioxide, and thereby affording an intact stand-alone thin film to separate from the substrate.
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Inventors:
BANERJEE DEBASISH
WU SONGTAO
ZHANG MINJUAN
ISHII MASAHIKO
WU SONGTAO
ZHANG MINJUAN
ISHII MASAHIKO
Application Number:
JP2011280250A
Publication Date:
July 12, 2012
Filing Date:
December 21, 2011
Export Citation:
Assignee:
TOYOTA ENG & MFG NORTH AMERICA
International Classes:
C01G23/04; C01B33/12; C01G27/02; G02B5/26
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Yoshihiro Kobayashi
Satoshi Deno
Atsushi Ebiya
Takashi Ishida
Tetsuji Koga
Yoshihiro Kobayashi
Satoshi Deno
Atsushi Ebiya