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Title:
METHOD OF MANUFACTURING STATIONARY BLADE STAGE OF TURBO-MOLECULAR PUMP
Document Type and Number:
Japanese Patent JP2004076623
Kind Code:
A
Abstract:

To provide a manufacturing method of a stationary blade stage for easily transmitting heat of a blade part to an outside casing part in a turbo-molecular pump.

A manufacturing process of the stationary blade stage 2 of the turbo-molecular pump forms an intermediate process member 1 composed of a first cylindrical part 1a of an outer peripheral part, a disk-like part 1b of an inner peripheral part of the first cylindrical part 1a and a second cylindrical part 1c of an inner peripheral part of the disk-like part 1b by integrally cutting out of a raw material. A large number of stationary blades 1ba are formed in the disk-like part 1b by upward cut work of a press. The intermediate process member 1 is divided into two parts along a diametral line passing through the center of the intermediate process member 1, and the stationary blade stage 2 composed of two semicircular shapes is formed.


Inventors:
IGUCHI MASASHI
Application Number:
JP2002235414A
Publication Date:
March 11, 2004
Filing Date:
August 13, 2002
Export Citation:
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Assignee:
OSAKA VACUUM LTD
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Attorney, Agent or Firm:
Teruaki Koyama