Title:
METHOD FOR MANUFACTURING SUBSTRATE PROCESSING TOOL AND SUBSTRATE PROCESSING TOOL
Document Type and Number:
Japanese Patent JP2016101664
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To shorten a time required for processing of a tool in manufacture of a substrate processing tool.SOLUTION: This tool manufacturing method is a method for manufacturing a substrate processing tool having a holding part held on a substrate processing device and a blade edge part provided at a tip. This manufacturing method includes a first step, a second step and a third step. In the first step, a base material of a processing tool is attached to a chuck of the tool processing device. In the second step, the base material, which is attached to the chuck in the first step, is processed thereby forming the holding part. In the third step, the base material, which is attached to the chuck in the first step, is processed thereby forming the blade edge part.SELECTED DRAWING: Figure 2
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Inventors:
HIRAGURI YOSUKE
OGASAWARA NORIYUKI
SATO SHINICHI
OGASAWARA NORIYUKI
SATO SHINICHI
Application Number:
JP2014239830A
Publication Date:
June 02, 2016
Filing Date:
November 27, 2014
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
B28D5/00; B24B5/04; B28D5/04
Domestic Patent References:
| JP2014004812A | 2014-01-16 | |||
| JPS4835585B1 | 1973-10-29 | |||
| JPH01500980A | 1989-04-06 | |||
| JPH027901U | 1990-01-18 | |||
| JPH05245701A | 1993-09-24 | |||
| JP2004115356A | 2004-04-15 | |||
| JPS542711B2 | 1979-02-10 | |||
| JPS61226230A | 1986-10-08 | |||
| JP4579900B2 | 2010-11-10 | |||
| JPH04304912A | 1992-10-28 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation