To provide a method of manufacturing a substrate with film by which a liquid material is used to efficiently form an organic film and to make a substrate with film.

This method is used to form an organic film on the upper surface (film formation face) of a wafer 10 and manufacture a substrate with film. The method includes a first step to vaporize a liquid material containing organic substance for forming the organic film and a second step to bring the vaporized organic substance into contact with the upper surface of the wafer 10 for condensation and organic film formation while cooling the upper surface of the wafer 10 and a substrate with film is obtained as a result. In the second step, it is preferable to house the wafer 10 in a chamber 2 and process it while heating the chamber 2.