Title:
レジスト付き基体の製造方法、レジストパターン付き基体の製造方法、パターン付き基体の製造方法及びレジスト処理方法
Document Type and Number:
Japanese Patent JP5924885
Kind Code:
B2
Inventors:
Kazuhiro Hamamoto
Hideo Kobayashi
Hideo Kobayashi
Application Number:
JP2011181981A
Publication Date:
May 25, 2016
Filing Date:
August 23, 2011
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G11B5/84; B29C33/38; B29C59/02; G03F7/039; G03F7/38; H01L21/027
Domestic Patent References:
| JP2001056558A | ||||
| JP2002031892A | ||||
| JP2004525425A | ||||
| JP2004198905A | ||||
| JP2009080452A |
Attorney, Agent or Firm:
Aniya Setsuo
Toru Yui
Hitoshi Kiyono
Fukuoka Masahiro
Okuyama Tomohiro
Toru Yui
Hitoshi Kiyono
Fukuoka Masahiro
Okuyama Tomohiro