To provide a method for manufacturing support frame for a pellicle which prevents occurrence of haze even under irradiation with high energy light as much as possible by reducing a content of inorganic acids, and a support frame for a pellicle, which is obtained by this method.
In the method for manufacturing a support frame for a pellicle which is formed with an aluminum material including aluminum or an aluminum alloy and includes an optical thin film body, an anodic oxidation film is formed on a surface of the aluminum material by anodic oxidation processing using an alkaline aqueous solution containing a tartaric acid, and the anodic oxidation film is subjected to dyeing processing using an organic dye and then is subjected to sealing processing by steam to obtain a support frame for the pellicle.
COPYRIGHT: (C)2011,JPO&INPIT
YAMAGUCHI TAKAYUKI
JP2004068103A | 2004-03-04 | |||
JP2005067618A | 2005-03-17 | |||
JP2008163379A | 2008-07-17 | |||
JPH05344757A | 1993-12-24 | |||
JP2004157229A | 2004-06-03 | |||
JP2007333910A | 2007-12-27 | |||
JP2001092113A | 2001-04-06 | |||
JP2004157229A | 2004-06-03 | |||
JP2004068103A | 2004-03-04 | |||
JP2005067618A | 2005-03-17 | |||
JP2008163379A | 2008-07-17 | |||
JPH05344757A | 1993-12-24 | |||
JP2007333910A | 2007-12-27 |
Katsuo Naruse
Tomohiro Nakamura
Masashi Torino