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Title:
METHOD FOR MANUFACTURING SUPPORT FRAME FOR PELLICLE, SUPPORT FRAME FOR PELLICLE, AND PELLICLE
Document Type and Number:
Japanese Patent JP2010237282
Kind Code:
A
Abstract:

To provide a method for manufacturing support frame for a pellicle which prevents occurrence of haze even under irradiation with high energy light as much as possible by reducing a content of inorganic acids, and a support frame for a pellicle, which is obtained by this method.

In the method for manufacturing a support frame for a pellicle which is formed with an aluminum material including aluminum or an aluminum alloy and includes an optical thin film body, an anodic oxidation film is formed on a surface of the aluminum material by anodic oxidation processing using an alkaline aqueous solution containing a tartaric acid, and the anodic oxidation film is subjected to dyeing processing using an organic dye and then is subjected to sealing processing by steam to obtain a support frame for the pellicle.

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
TAGUCHI YOSHIHIRO
YAMAGUCHI TAKAYUKI
Application Number:
JP2009082579A
Publication Date:
October 21, 2010
Filing Date:
March 30, 2009
Export Citation:
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Assignee:
NIPPON LIGHT METAL CO
International Classes:
B65D85/86; G03F1/62; G03F1/64
Domestic Patent References:
JP2004068103A2004-03-04
JP2005067618A2005-03-17
JP2008163379A2008-07-17
JPH05344757A1993-12-24
JP2004157229A2004-06-03
JP2007333910A2007-12-27
JP2001092113A2001-04-06
JP2004157229A2004-06-03
JP2004068103A2004-03-04
JP2005067618A2005-03-17
JP2008163379A2008-07-17
JPH05344757A1993-12-24
JP2007333910A2007-12-27
Attorney, Agent or Firm:
Kazuya Sasaki
Katsuo Naruse
Tomohiro Nakamura
Masashi Torino



 
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