Title:
METHOD OF MANUFACTURING THIN FILM CAPACITOR
Document Type and Number:
Japanese Patent JPS5324553
Kind Code:
A
Inventors:
SATOU SATOHIKO
YANAGISAWA KATSUAKI
YANAGISAWA KATSUAKI
Application Number:
JP9910076A
Publication Date:
March 07, 1978
Filing Date:
August 18, 1976
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L27/01; H01G4/005; H01G4/10; (IPC1-7): H01G4/10
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