Title:
薄膜集積回路の作製方法及びICラベルの作製方法
Document Type and Number:
Japanese Patent JP4823705
Kind Code:
B2
Inventors:
Yasuyuki Arai
Akira Ishikawa
Toru Takayama
Junya Maruyama
Yugo Goto
Yumiko Fukumoto
Yuko Tatemura
Akira Ishikawa
Toru Takayama
Junya Maruyama
Yugo Goto
Yumiko Fukumoto
Yuko Tatemura
Application Number:
JP2006025256A
Publication Date:
November 24, 2011
Filing Date:
February 02, 2006
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L21/02; B65D23/12; B65D25/20; G06K17/00; G06K19/07; G06K19/077; H01L21/336; H01L27/08; H01L27/12; H01L29/786
Domestic Patent References:
| JP2003016412A | ||||
| JP2002164512A | ||||
| JP61206304A | ||||
| JP11243209A | ||||
| JP11134460A | ||||
| JP2002184959A | ||||
| JP2001007340A | ||||
| JP2003045890A |
Foreign References:
| WO2003010825A1 |