Title:
真空ポンプの磁気支承部のマグネットリングのマーキングの為の方法
Document Type and Number:
Japanese Patent JP6681434
Kind Code:
B2
Abstract:
To mark magnetic rings of a magnetic supporting portion of a vacuum pump without degrading vacuum generation.SOLUTION: In a method of making magnetic rings (195, 197) of a magnetic supporting portion (183) of a vacuum pump (111), in particular, a turbomolecular pump, markings (225, 227) are applied to surfaces of the magnetic rings (195, 197) by providing them with surface characteristics different from that of the other remaining surface of the magnetic rings (195, 197), by heating.SELECTED DRAWING: Figure 1
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Inventors:
Adrien Wild
Joachim Karl
Joachim Karl
Application Number:
JP2018114171A
Publication Date:
April 15, 2020
Filing Date:
June 15, 2018
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04D19/04; F16C32/04
Domestic Patent References:
| JP2014146795A | ||||
| JP2015158201A | ||||
| JP2014514519A |
Foreign References:
| EP1477695A2 | ||||
| EP2829757A1 | ||||
| US20150028004 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura