Title:
METHOD OF MEASURING ION COMPONENT RATIO IN ION IRRADIATING DEVICE
Document Type and Number:
Japanese Patent JP3716711
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To simply and accurately find in a short time a ratio of an purposive componental ion contained in an ion beam extracted from an ion source.
SOLUTION: In this measuring method, a deflector 24 to receive the ion beam 10 extracted from the ion source 2 and bend it by a magnetic field, and a Faraday cup 30 provided at a position where the ion beam 10 making a straight advance in the deflector 24 is injected are used. When magnetic field strength in the deflector 24 is reduced to zero, an ion current I0 passing through the Faraday cup 30 is measured, and when the magnetic field strength in the deflector 24 is gradually increased, ion currents I1 and I2 on two flat parts where the change of the ion current I passing through the Faraday cup 30 becomes almost zero near the magnetic field strength corresponding to the purposive componental ion are individually measured. Thereby, a ratio of &verbar I1-I2&verbar /I0 is found.
Inventors:
Hiroshi Inuchi
Application Number:
JP2000181556A
Publication Date:
November 16, 2005
Filing Date:
June 16, 2000
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
G01N27/62; H01J37/04; H01J37/317; H01L21/265; (IPC1-7): H01J37/317; G01N27/62; H01J37/04; H01L21/265
Domestic Patent References:
| JP6036737A | ||||
| JP11154485A | ||||
| JP9106779A | ||||
| JP2000011931A |
Attorney, Agent or Firm:
Keiji Yamamoto
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