Title:
層厚及び粘弾性係数の測定方法、及び層厚及び粘弾性係数の測定装置
Document Type and Number:
Japanese Patent JP7201456
Kind Code:
B2
Abstract:
To measure the thickness of a layer formed on a piezoelectric element with high accuracy from the initial stage.SOLUTION: The method for measuring a layer thickness and a viscoelastic coefficient, in which a sensor including a piezoelectric element having a resonance frequency is immersed into a solution, comprises: acquiring a variation ΔFby which the fundamental frequency Fof a resonance frequency generated by forming a layer on the piezoelectric element in the solution shifts, a variation ΔFby which the high order wave frequency Fof the resonance frequency shifts, a variation ΔFby which the half-value half-width Fof a peak waveform having the fundamental frequency as a peak shifts and a variation ΔFby which the half-value half-width Fof a peak waveform having a high order wave as a peak shifts; and calculating the thickness h of the layer, the storage modulus G' of the layer, a loss modulus G'' on the basis of the fundamental frequency Fof the layer and a loss modulus G'' on the basis of the high order wave frequency Fof the layer from the variation ΔF, the variation ΔFand the variation ΔFand the variation ΔFusing an evaluation function.SELECTED DRAWING: Figure 1
Inventors:
Atsushi Ito
My wife Michiru
Ichihashi Motoko
My wife Michiru
Ichihashi Motoko
Application Number:
JP2019008711A
Publication Date:
January 10, 2023
Filing Date:
January 22, 2019
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01N19/00; G01N11/00; G01R27/02
Domestic Patent References:
| JP2014134396A | ||||
| JP5372263B2 |
Attorney, Agent or Firm:
Patent Attorney Corporation Minami Aoyama International Patent Office
Junichi Omori
Takahashi Mitsuru
Teppei Nakamura
Hibino Yukinobu
Junichi Omori
Takahashi Mitsuru
Teppei Nakamura
Hibino Yukinobu