Title:
METHOD FOR MEASURING NONCONTACT SURFACE SHAPE
Document Type and Number:
Japanese Patent JP3923945
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a noncontact surface shape measuring method, capable of accurately measuring, even the surface which is a sharp angle with respect to a laser probe.
SOLUTION: In specific ranges A, C including a part tilted by over ±30° from the optimum measuring state with respect to the laser probe L, measurement is performed after rotating a work 1, before measurement, to reduce the angle of the surface in the specific range A, C to be smaller than ±30°, and thereby the measurement data in the specific range A, C can be acquired accurately in a coordinate system different from a general range. Since the measurement of the measured data in the general range B and in the specific range A, C is performed in the partially duplicated state with a mutually adjacent range M, combined data over the whole scanning range are generated, by overlapping and linking duplicated data relative to the measurement data in each of the ranges A-C, and the surface shape of the work can be measured from the combined data.
Inventors:
Katsushige Nakamura
Katsuhiro Miura
Hideo Furutajima
Katsuhiro Miura
Hideo Furutajima
Application Number:
JP2004005389A
Publication Date:
June 06, 2007
Filing Date:
January 13, 2004
Export Citation:
Assignee:
Mitaka Koki Co., Ltd.
International Classes:
G01B11/24; G01B11/255; G01B21/20; G02B21/00; (IPC1-7): G01B11/24
Domestic Patent References:
| JP63243708A | ||||
| JP933244A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
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