Title:
電磁放射を用いて測定対象物を測定する方法及びＴＨｚ測定装置
Document Type and Number:
Japanese Patent JP7061727
Kind Code:
B2
Abstract:
The invention relates to a method for THz measuring a measurement object (3), including at least the following steps:phase or a pre-measurement, in which e.g. a first THz transmission beam (112) of a THz transceiver of a THz measuring device (2) is emitted at a first frequency range and having a first bandwidth along an optical axis towards the measurement object (3) and THz radiation reflected from a boundary surface of the measurement object (3) is detected,determining, whether a measurement object (3) has been detected,if the measurement object (3) has been detected, determining a current distance of the THz measuring devices (2) or the THz transceiver from the boundary surface (St5),comparing the determined des current distance with a distance limit, andwhen the distance limit has not been exceeded, subsequent initiation of a main measurement or indication of an initiation of the main measurement,phase of the main measurement, in which a main measurement THZ transmission beam is emitted along the optical axis towards the measurement object and reflected THz radiation is detected,whereby, preferably, a second bandwidth of the main measurement THZ transmission beam is wider than the first bandwidth,whereby measured characteristics, e.g. a layer thickness or material composition, are determined from the emitted main measurement THZ transmission beam and the detected reflected THz radiation,putting out the measurement result.
Inventors:
Klose Ralph
Application Number:
JP2021506040A
Publication Date:
April 28, 2022
Filing Date:
April 18, 2019
Export Citation:
Assignee:
Innox Geembeher Inovazionen Und Aus Rustungen Fur Dee Extorzion Stehinik
International Classes:
G01B11/06; G01N21/3581
Domestic Patent References:
| JP2002306418A | ||||
| JP2009075071A | ||||
| JP8320254A | ||||
| JP2004069571A | ||||
| JP2007333379A |
Foreign References:
| US20150060673 | ||||
| US20150212060 | ||||
| US20130015354 | ||||
| US20160216202 | ||||
| CN102175662A |
Attorney, Agent or Firm:
Hideki Imai