Title:
METHOD OF MEASURING PHYSICAL CONSTANT OF THIN FILM
Document Type and Number:
Japanese Patent JP2016048184
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of measuring a physical constant of a thin film.SOLUTION: A method of measuring a physical constant of a thin film measures the density of a thin film 5 and the frequency characteristics of a leaking Lamb wave or a leaking surface wave propagating on the thin film, obtains the relationship between the sound speed of at least one of the S0 mode, A1 mode and the lower-order or higher-order mode of these modes of the leaking Lamb wave, or the sound speed of the leaking surface wave and the frequency with an ultrasonic microscope, calculates the sound speed at the plurality of frequencies with the obtained physical constant and an unknown physical constant of the thin film as variables to obtain a sound speed calculation value, analyzes the sound speed calculation value so as to bring the value close to the sound speed at the plurality of frequencies in the relationship between the measured sound speed and frequency, and sets the variable in the case of being the closest as the value of the unknown physical constant.SELECTED DRAWING: Figure 3
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Inventors:
KADOTA MICHIO
TANAKA SHUJI
TANAKA SHUJI
Application Number:
JP2014172776A
Publication Date:
April 07, 2016
Filing Date:
August 27, 2014
Export Citation:
Assignee:
UNIV TOHOKU
MURATA MANUFACTURING CO
MURATA MANUFACTURING CO
International Classes:
G01N29/00; G01N9/00; G01N29/24
Attorney, Agent or Firm:
Patent business corporation Miya saki, table of contents patent office
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