Title:
METHOD OF MEASURING PRESSURE IN PRESSURE REDUCING VAPOR PHASE GROWING APPARATUS
Document Type and Number:
Japanese Patent JPS55120141
Kind Code:
A
Abstract:
PURPOSE:To vapor phase grow a specimen with preferable reproducibility in a pressure reducing vapor phase growing apparatus by retaining the temperature of the connector of a Pirani gauge sensor constant to eliminate the variation in the indicated value of the sensor and to povide accurate pressure indicating value. CONSTITUTION:Cooling water 14 is introduced into a compression seal 8 and a manifold 9 of a pressure reducing vapor phase growing apparatus to eliminate the heat from transfer from a furnace 1 to the apparatus and adverse heat affection thereto when picking up a specimen from the apparatus so as to prevent the temperature increase of a Pirani gause sensor 12. Thus, the variation in the indicated value of the sensor is removed so that the sensor indicates accurate pressure. Accordingly, the apparatus can vapor phase grow the specimen with preferable reproducibility.
Inventors:
OKA TADAO
Application Number:
JP2749279A
Publication Date:
September 16, 1980
Filing Date:
March 08, 1979
Export Citation:
Assignee:
CHO LSI GIJUTSU KENKYU KUMIAI
International Classes:
G01L21/12; C23C16/52; C30B25/16; H01L21/205; H01L21/31; (IPC1-7): C23C11/00; C30B25/16; G01L21/12; H01L21/205