PURPOSE: To measure propagation of microwaves with less influence of disturbance by using a material coated with a material which generates heat by absorbing the microwaves for a material surface which is irreversibly changed by heating.
CONSTITUTION: The rear surface of thermosensitive paper 1, etc., which are irreversibly changed by heating is patterned and coated with carbon 2, etc., which generate heat by absorbing the microwaves. The thermosensitive paper 1 with such carbon 2 is fixed by an adhesive tape, etc., to a fixing frame 3 formed to a cylindrical shape by a cardboard, etc., and is arranged on a quartz plate 5 in a treating chamber 4, by which the measurement of the propagation of the microwaves is executed. A material 10 to be treated is subjected to an etching treatment by the plasma formed by the incident microwaves on the inside of the treating chamber 4. At this time, the uniformity of the plasma in the treating chamber 4 is best when the spacing (h) between an upper waveguide pipe 8b and the quartz plate 5 is changed and the doughnut-shaped electric field distribution of the microwaves appears as the pattern changed to the black of the thermosensitive paper 1 with the carbon 2.
FURUSE MUNEO
SHIRAYONE SHIGERU
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