To provide an aspherical shape measuring method for measuring an aspherical lens precisely, and a highly precise lens manufacturing method.
In this shape measuring method wherein a phase difference by interference between reflected light from a surface to be examined and reflected light from a Fizeau surface is detected by a detector to measure the shape of the surface to be examined, the surface shape of the surface to be examined is measured by correcting a shape difference from a desired design value of a reference standard to a shape difference with respect to the reference standard of the surface to be examined calculated based on a phase distribution measuring process for the surface, a phase distribution measuring process for a prescribed reference standard, and a phase distribution measured by the two processes, the shape difference from the desired design value of the reference standard is expressed by a rotation-symmetric error component and a non-rotation-symmetric error component, and the rotation-symmetric error component is expressed by a rotation-symmetric error higher-component and a rotation-symmetric error lower-component out of a difference between a phase distribution of a calibration standard preliminarily measured, and a phase distribution of the reference standard.
| JPS5256558 | THREE-DIMENTIONAL OBJECT MEASURING SYSTEM |
| WO/2002/014845 | OPTICAL MEASURING SYSTEM |
TAKIGAWA YUICHI
GENMA TAKASHI
