Title:
METHOD FOR MEASURING TAB, PROBE CARD, TAB HANDLER AND IC CHIP
Document Type and Number:
Japanese Patent JP2001185588
Kind Code:
A
Abstract:
To provide an effective method for measuring TAB, probe card, TAB handier and IC chip, by detecting defective position of TAB handler and TAB prior to measurement of IC chip.
A pattern 5 is formed for positioning the TAB 1 with the probe card 9. The probe card 9 has probes 7A, 7B for confirming positions brought into contact with pads 5A, 5B. The TAB handler brings the position confirming pads 5A, 5B into contact with the position confirming probes 7A, 7B, and confirms contact of the TAB with the probe card by the output of a detecting circuit 15. When a normal contact is confirmed, the TAB is measured.
Inventors:
TEZUKA TOSHIYUKI
Application Number:
JP36515899A
Publication Date:
July 06, 2001
Filing Date:
December 22, 1999
Export Citation:
Assignee:
ANDO ELECTRIC
International Classes:
H01L21/60; G01R1/067; H01L21/66; G01R31/316; (IPC1-7): H01L21/60
Attorney, Agent or Firm:
Hiroshi Arafune (1 person outside)