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Patent Searching and Data


Title:
METHOD FOR MEASURING TEMPERATURE
Document Type and Number:
Japanese Patent JP2001007006
Kind Code:
A
Abstract:

To provide a method for measuring temperature by which the temperature distribution in a hot plate incorporated in a heat-treating unit during an actual process can be measured easily and accurately, and a coating and developing system.

In a method for measuring temperature, a coating solution which forms a film of different thickness in coping with temperature changes is applied to a dummy wafer W for measurement, and the wafer W is placed on a hot plate 152 incorporated in a heat-treating unit. Then the thickness of the film formed of the applied solution on the wafer W is measured. As a result, the temperature distribution in the hot plate 152 can be comprehended by computing the temperature distribution in the wafer W corresponding to the thickness distribution of the film.


Inventors:
Yoshioka, Kazutoshi
Application Number:
JP1999000176677
Publication Date:
January 12, 2001
Filing Date:
June 23, 1999
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/027; G01K5/50; G03F7/30; H01L21/02; G01K5/00; G03F7/30; (IPC1-7): H01L21/027; G01K5/50; G03F7/30