METHOD FOR MEASURING THICKNESS OF OXIDATION FILM

Japanese Patent JP3165376

B2

PROBLEM TO BE SOLVED: To easily and exactly perform measurement by irradiating a specimen with an electron beam of prescribed acceleration voltage, and calculating the thickness of an oxide film of the specimen on the basis of intensity of characteristic X-ray Kα of oxygen secondarily generated from the surface of the specimen.
SOLUTION: A vacuum vessel 1 is provided with an electron gun 7 for irradiating a specimen 3 as a subject with an electron beam 5, an electron optical system 9 provided on the stroke circumference of the electron gun 7 and having an electromagnetic coil accelerating the electron beam 5 and a detector 15 for detecting X-rays 21 secondarily generated from the surface of a specimen 3 reflected on an X-ray spectral crystal 13. With regard to the thickness of an oxidation film, the intensity of characteristic X-ray Kα(O-Kα) of oxygen for the known specimen is measured to prepare a calibration curve. Since the thickness of the oxide film of each specimen and the intensity of O-Kα are arranged on one straight line, the straight line is made the calibration line, and with regard to the thickness of the oxide film, it is calculated on the basis of the intensity of O-Kα for the unknown aluminum material.

Masahiro Nishio

JP25955596A

May 14, 2001

September 30, 1996

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Sumitomo Light Metal Industry Co., Ltd.

G01N23/225; G01B15/02; (IPC1-7): G01N23/225; G01B15/02

JP639807A
JP5486367A
JP8338819A
JP6222019A
JP60244844A
JP58160344U

【文献】国際公開94/8232(WO,A1)

Tsutomu Adachi

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