Title:
METHOD FOR OPTIMIZING EFFECTIVE LIGHT INTENSITY
Document Type and Number:
Japanese Patent JP2015031955
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for optimizing effective light intensity.SOLUTION: An effective light intensity distribution is optimized by the steps of: (a) providing a light source discharging a light beam 1 of a first intensity distribution 2a in a Z-axis direction; (b) providing a beam formation optical unit 3 and a beam focusing optical unit 4 that are provided in an x-y plane, and generate a second intensity distribution to be used in a target plane, in which the target plane is tilted by an angle alpha with respect to a focal plane 5 to be determined by the beam focusing optical unit; (c) measuring first intensity at a first point P1 of the second intensity distribution to be used, and second intensity at a second point P2 thereof, in which the points P1 and P2 are disposed on a different side of a rear focal plane 5; (d) moving the beam formation optical unit along a y-axis, and causing a difference between the two pieces of intensity to fall within a predetermined limit.
Inventors:
CHRIS SCHILD
TOBIAS GRAF
TOBIAS GRAF
Application Number:
JP2014142387A
Publication Date:
February 16, 2015
Filing Date:
July 10, 2014
Export Citation:
Assignee:
JENOPTIK OPTICAL SYS GMBH
International Classes:
G02B27/09; G02B19/00
Foreign References:
| DE102008005219A1 | 2009-07-23 | |||
| DE102011119565A1 | 2012-11-22 | |||
| US20030128342A1 | 2003-07-10 | |||
| US7532651B2 | 2009-05-12 | |||
| US7554737B2 | 2009-06-30 | |||
| DE102008005219A1 | 2009-07-23 | |||
| DE102011119565A1 | 2012-11-22 | |||
| US20030128342A1 | 2003-07-10 | |||
| US7532651B2 | 2009-05-12 | |||
| US7554737B2 | 2009-06-30 |
Attorney, Agent or Firm:
Tanabe 徹