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Title:
METHOD FOR PREPARING COATING SOLUTION, AND METHOD FOR USING THE SAME COATING SOLUTION FOR COATING SUBSTRATE
Document Type and Number:
Japanese Patent JP2008101208
Kind Code:
A
Abstract:

To provide a coating having a uniform composition and thickness even when a size of a substrate is increased.

The method for preparing the coating solution comprises: a process to provide a first solution comprising a lower alcohol, a polyethylene glycol, a complexing agent, and water; a process to provide a second solution comprising a higher alcohol and at least one sort of metal alkoxide (the metal of the metal alkoxide is selected from zirconium, aluminum, titanium, tantalum, and yttrium); a process to form a sol-gel solution by mixing the first and second solutions and to hydrolyse at least one of the metal alkoxide to a metal oxide and an alcohol; a process to form a concentrated solution by removing the lower alcohol and an alcohol formed by hydrolysis of at least one of the metal alkoxide; and a process to form a coating solution by adding a middle class alcohol to the concentrated solution.


Inventors:
KLIPP ANDREAS
CORNELIA KLEIN
ALEXANDER MICHAELIS
MAYER-UHMA TOBIAS
SCHLENKRICH FALKO
WEGE STEPHAN
Application Number:
JP2007267394A
Publication Date:
May 01, 2008
Filing Date:
October 15, 2007
Export Citation:
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Assignee:
QIMONDA AG
International Classes:
C09D185/00; B05D1/40; C09D7/12; C09D171/02
Domestic Patent References:
JPS55149920A1980-11-21
JPH09223830A1997-08-26
JP2003095651A2003-04-03
JPS63258959A1988-10-26
JP2000212469A2000-08-02
JP2001262009A2001-09-26
JPH09223831A1997-08-26
JP2001072926A2001-03-21
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda



 
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