Title:
METHOD FOR PROCESSING WORKPIECE
Document Type and Number:
Japanese Patent JP2023114076
Kind Code:
A
Abstract:
To provide a method for processing a workpiece that can provide high flatness of a surface to be polished while efficiently processing a workpiece.SOLUTION: A method for processing a workpiece which is applied when processing a plate-like workpiece having a first surface and a second surface located on an opposite side to the first surface includes: a grinding step of grinding a workpiece from a second surface side with a grinding wheel; a washing step of washing a surface to be ground of the workpiece after the grinding step; and a polishing step for polishing the workpiece from the side of the surface to be ground with a polishing pad after the washing step.SELECTED DRAWING: Figure 4
Inventors:
OHINO KOICHI
BEPPU YUKI
BEPPU YUKI
Application Number:
JP2022016188A
Publication Date:
August 17, 2023
Filing Date:
February 04, 2022
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/06; B24B7/04; B24B37/10; H01L21/304
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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