PURPOSE: To obtain aluminum nitride powder in a good yield, even when an aluminum liquid bath of relatively low temperature is employed by blowing a gas on the surface of the aluminum liquid bath when aluminum vapor is generated from an aluminum liquid bath, and then reacted with a nitride- producing gas.
CONSTITUTION: When aluminum vapor is generated from an aluminum liquid bath (4: crucible) and subsequently reacted with a nitride-producing gas 6 at a prescribed reaction temperature in an aluminum floating state to produce aluminum nitride powder, a gas 5 is blown on the surface of the aluminum liquid bath. The nitride-producing gas is preferably nitrogen gas, ammonia gas, etc. The gas used for blowing on the surface of the liquid bath is preferably an inert gas such as argon gas but may be the nitride-producing gas such as the nitrogen gas or ammonia gas.
FURUKAWA YUICHI
NONAKA JUICHI
MUROOKA SHUICHI
