To provide a barrier film substrate having higher barrier properties.

A method, for producing the barrier film substrate having an organic region and an inorganic region on a support while conveying the support, comprises: a step where the organic region is provided; a step where the inorganic region is provided; and a step where a part or the whole of the support is provided with a magnetic layer. The whole or a part of a step where the support is conveyed is performed using a carriage body having a magnetic part 31 showing a magnetic pole opposite to that of the magnetic layer while allowing the magnetism of the magnetic layer and the magnetism of the magnetic part to attract each other.