To obtain a woven fabric made of graphitized carbon yarn having a necessary heat conductivity, for example, in the case of a reinforcing material of a composite material to be used as a heat radiation member of a semiconductor apparatus.
This three-dimensionally woven fabric F is constituted of three axes comprising a laminated yarn group 3 of biaxial orientation formed by laminating a plurality of yarn (x) layers and yarn (y) layers arranged mutually in parallel and yarns (z) in the thickness direction arranged in the direction perpendicular to a yarn (x) layer 1 and a yarn (y) layer 2. The three- dimensionally woven fabric F is produced dividedly by two stages. In the first stage, a three-dimensional woven fabric is woven by using a pitch-based carbon yarn having a weavable flexibility. The pitch-based carbon yarn produced by baking at a relatively low-temperature of about 1,000°C not excessively advancing graphitization is used as the carbon yarn. Then, in the second stage, in order to advance graphitization so as to make the carbon yarn constituting the three-dimensionally woven fabric reach a fixed heat conductivity, the three- dimensionally woven fabric is baked at a second baking temperature of a higher temperature of ≥about 2,500°C.
YASUI YOSHIHARU
HORI FUJIO
Next Patent: THREADING APPARATUS FOR FALSE TWISTING MACHINE