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Patent Searching and Data


Title:
METHOD FOR PRODUCING CERAMIC FILM AND PRESSURIZED HEAT TREATMENT EQUIPMENT FOR USE THEREIN
Document Type and Number:
Japanese Patent JP2004281900
Kind Code:
A
Abstract:

To provide a method for producing a ceramic film which can be crystallized well under pressure, and a pressurized heat treatment equipment for use in that production method in which specified pressure and temperature can be set in a short time.

The method for producing a ceramic film comprises a step for preparing an article being treated 100 where a substrate is coated with a material containing a composite oxide, and a step for holding the article being treated 100 in a chamber 200 and heat treating it under a specified pressure in treating gas pressurized to 2 atm or above and containing at least an oxidative gas thus crystallizing the material. The treating gas is preheated at a specified temperature before supplied to the chamber.


Inventors:
KIJIMA TAKESHI
NATORI EIJI
Application Number:
JP2003073929A
Publication Date:
October 07, 2004
Filing Date:
March 18, 2003
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H01L21/316; B05D3/02; C04B35/491; C04B35/622; C04B41/00; C23C18/12; C30B1/12; F27B5/16; F27B17/00; H01L21/02; H01L21/324; H01L21/82; H01L21/8239; H01L27/10; (IPC1-7): H01L21/316
Attorney, Agent or Firm:
Inoue Ichi
Yukio Fuse
Mitsue Obuchi