METHOD FOR PRODUCING FERROELECTRIC BISMUTH TITANATE LAYER ON SUBSTRATE

Title:

METHOD FOR PRODUCING FERROELECTRIC BISMUTH TITANATE LAYER ON SUBSTRATE

Document Type and Number:

Japanese Patent JPH05246722

Kind Code:

A

Abstract:

PURPOSE: To form a ferroelectric layer by making an organic solvent solution contain Bi and Ti in the shape of metal organic or inorganic compounds in a stoichiometric ratio, bringinging the uniformly mixed organic solvent solution into contact with a substrate, and performing a heat treatment in the range of specified temperatures.

CONSTITUTION: A prescribed quantity of Bi compounds such as Bi(NO3)3.5H2O is dissolved in the mixed solution of methoxiethanol and glycerol or the like. The Ti compound such as tetrabutyl acid titanium in the stoichimetric ratio is added and mixed with this solution. Next, a thin layer is formed by spin- coating the substrate of Si monocrystallites or the like in (100) orientation with this solution. Afterwards, this thin layer is heated up to 500 to 650°C at a temperature elevation speed of 250 K/hour, annealed for about 60 minutes and cooled to a room temperature at a cooling speed of 250 K/hour so that the ferroelectric layer of Bi4Ti3O12 can be provided.

Inventors:

MARAIKU KURII
BUORUFUGANGU BURANDO
HENRIKASU ARUBERUTASU MARIA FU

Application Number:

JP22588292A

Publication Date:

September 24, 1993

Filing Date:

August 25, 1992

Export Citation:

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Assignee:

PHILIPS NV

International Classes:

C23C18/12; H01B3/00; H01B3/12; H01G4/33; C01G29/00; H01G7/06; H01L21/28; H01L21/316; H01L21/314; (IPC1-7): C01G29/00; H01B3/00; H01B3/12; H01G4/06

Attorney, Agent or Firm:

Akihide Sugimura (5 outside)

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