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Patent Searching and Data


Title:
膜形成用組成物の製造方法、膜形成用組成物および絶縁膜形成用材料
Document Type and Number:
Japanese Patent JP4304774
Kind Code:
B2
Inventors:
Nishikawa General Rules
Mayumi Kakuda
Tomotaka Shinoda
Sakako Hakazuka
Masahiko Ebisawa
Kinji Yamada
Application Number:
JP19730199A
Publication Date:
July 29, 2009
Filing Date:
July 12, 1999
Export Citation:
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Assignee:
JSR CORPORATION
International Classes:
C09D183/04; H01L21/312; H01L21/316
Domestic Patent References:
JP7157715A
JP8130247A
JP9012583A
JP10226767A
JP11005841A
JP11061045A
JP11157838A
JP8501823A
JP64026639A
JP6248083A
JP8143818A
JP10265736A
JP10316934A
JP2000256621A
JP2000345041A
JP2001022083A
JP2001166490A