Title:
高純度合成石英ガラス粉の製造方法
Document Type and Number:
Japanese Patent JP4548625
Kind Code:
B2
Inventors:
Hiroshi Matsui
Hoshikawa Kazumi
Liner kepler
Fritz-Ullrich Kreis
Klaus Anort
Hoshikawa Kazumi
Liner kepler
Fritz-Ullrich Kreis
Klaus Anort
Application Number:
JP27373699A
Publication Date:
September 22, 2010
Filing Date:
September 28, 1999
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
C01B33/18; C03B20/00
Domestic Patent References:
| JP11130417A |
Attorney, Agent or Firm:
Heihachi Hattori