イリジウム含有薄膜の化学気相成長法による製造方法

Title:

イリジウム含有薄膜の化学気相成長法による製造方法

Document Type and Number:

Japanese Patent JP4096480

Kind Code:

B2

More Like This:

JP5629061	How to use it as a perfluoride amide salt and an ionic conductive material
WO/2013/190328	1,1 '-[[(SUBSTITUTED ALKYL)IMINO]BIS(ALKYLENE)]BIS-FERROCENES AND THEIR USE IN I ELECTROCHEMICAL ASSAYS BY LABELLING SUBSTRATES OF INTEREST
WO/2021/139395	HIGH-EFFICIENCY LOW-TOXICITY ANTI-CANCER COMPOUND SYNTHESIZED BY AUTOCATALYSIS IN CELLS AND LIVING BODIES AND SYNTHESIS METHOD FOR ANTI-CANCER COMPOUND

Inventors:

Tomozawa
Hirosawa Fujisawa
Masaru Shimizu
Hirohiko Niu

Application Number:

JP37710999A

Publication Date:

June 04, 2008

Filing Date:

December 24, 1999

Export Citation:

Assignee:

High purity chemical research institute
Masaru Shimizu

International Classes:

C07F17/02; C23C16/18; C07F15/00; H01L21/285

Domestic Patent References:

Previous Patent: グリッパ装置

Next Patent: サーボ制御装置