Title:
METHOD FOR PRODUCING METAL MASK
Document Type and Number:
Japanese Patent JP2014077186
Kind Code:
A
Abstract:
To form uniformly a high-definition opening pattern in a plane of a large area metal mask corresponding to a large-sized substrate.
A method for producing a metal mask for forming a plurality of thin film patterns on a substrate includes: a plating step S1 to form a magnetic metal member with an opening pattern identical to a shape dimension of the thin film pattern corresponding to forming positions of the plurality of thin film patterns on a resin film by electrolytic plating; and a film removal step S3 to remove the film from the magnetic metal member subsequent to the plating step S1.
Inventors:
KUDO SHUJI
MIZUMURA MICHINOBU
KAJIYAMA KOICHI
KIMURA ERIKO
MIZUMURA MICHINOBU
KAJIYAMA KOICHI
KIMURA ERIKO
Application Number:
JP2012226829A
Publication Date:
May 01, 2014
Filing Date:
October 12, 2012
Export Citation:
Assignee:
V TECHNOLOGY CO LTD
International Classes:
C25D1/00; C25D1/08; H01L51/50; H05B33/10
Domestic Patent References:
| JPH1034870A | 1998-02-10 | |||
| JP2010242141A | 2010-10-28 | |||
| JP2005015908A | 2005-01-20 | |||
| JPS3618961B1 | ||||
| JPS4520032B1 | ||||
| JPS49105734A | 1974-10-07 |
Other References:
神戸 徳蔵ら, 無電解メッキ・電鋳 金属メッキ技術（５）, vol. １版 ２刷, JPN6016026809, 20 July 1976 (1976-07-20), JP, pages 84 - 85, ISSN: 0003358669
Attorney, Agent or Firm:
Tomijio Sasashima
Haruyuki Nishiyama
Shoichi Okuyama
Moriaki Ogawa
Haruyuki Nishiyama
Shoichi Okuyama
Moriaki Ogawa