Title:
METHOD OF PRODUCING METALLIC THIN FILM CIRCUIT
Document Type and Number:
Japanese Patent JPS5354776
Kind Code:
A
Inventors:
YAMANAKA RIKUO
SANADA YOSHIAKI
SANADA YOSHIAKI
Application Number:
JP12990176A
Publication Date:
May 18, 1978
Filing Date:
October 27, 1976
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H05K3/06; H01L49/02; H05K3/24; H05K3/46; (IPC1-7): H01L49/02; H05K3/06